X- Ray Fluorescence
Fast and precise inorganic solid analysis
X-ray fluorescence spectroscopy (XRF) is a well-established analytical technique for the determination of the elemental composition of solid materials in bulk or thin film form. Its speed, reliability and accuracy make it extremely useful for process development/control and process optimization.
In XRF a sample is irradiated by an X-ray beam, which results in ejection of inner shell electrons from the sample atoms. Outer shell electrons take their place and the difference in energy level results in the emission of X-rays (secondary radiation). The wavelength of these X-rays is characteristic for each element present, and the intensity of the emission is related to the concentrations of the elements.